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Wet Station WS-820L / 620C
Wet Station WS-820L / 620C
Features
Two transfer types
Choose either the WS-620C with carrier transfer processing, or the WS-820L with carrierless transfer processing.
Flexible design
Systems can be configured freely, depending on the application. Processing bath configurations can incorporate up to 13 baths.
High throughput
Multiple baths can be installed and up to six transfer robots can be mounted to ensure high throughput.
High quality processing
Optimized processing bath design, strict chemical management, and clean drying units contribute to stable, high-quality processing.
Extensive lineup of peripheral devices
A wide range of peripheral devices are available, including wafer transfer units and cassette stockers.
Prevention of water marks
A low-pressure drying unit can be mounted to reduce water marks and ensure clean drying. (Available only for WS-820L)
Wet Station
Wet Station FC-3100
Wet Station WS-820L / 620C
Wet Station FC-821L
Wet Station CW-1500
Spin Processor
Single Wafer Cleaner SU-3200
Single Wafer Cleaner SU-3100
Spin Processor MP-2000
Scrubber
SS-3200 Scrubber
SS-3100 Scrubber
SS-80BW / SS-W60A Scrubbers
Polymer Removal
Single Wafer Cleaner SU-3100
Polymer Remover SR-2000
Annealing System
Flash Lamp Annealer LA-3000-F
Infrared Lamp Annealer LA-830
Measurement System
RE Series
Lambda Ace VM-2200 / VM-3200 Series
Lambda Ace VM-1200 Series
Lambda Ace VM-1020/1030
Inspection System
Wafer Pattern Inspection System ZI-2000
Advanced Packaging Lithography
DW-3000
News Releases
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